| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | plutao.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 8JMKD3MGP3W/3GDPN7S |
| Repository | sid.inpe.br/plutao/2014/06.03.16.52 (restricted access) |
| Last Update | 2015:02.10.12.40.41 (UTC) administrator |
| Metadata Repository | sid.inpe.br/plutao/2014/06.03.16.52.57 |
| Metadata Last Update | 2018:06.04.23.39.27 (UTC) administrator |
| DOI | 10.1088/1742-6596/511/1/012084 |
| ISSN | 1742-6588 |
| Label | lattes: 3956926180174007 1 PillacaKostUeda:2014:StMaFi |
| Citation Key | PillacaKostUeda:2014:StMaFi |
| Title | Study of magnetic field enhanced plasma immersion ion implantation in Silicon  |
| Year | 2014 |
| Access Date | 2024, May 19 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 1770 KiB |
| 2. Context | |
| Author | 1 Pillaca, Elver Juan de Dios Mitma 2 Kostov, K G 3 Ueda, Mario |
| Resume Identifier | 1 2 3 8JMKD3MGP5W/3C9JHSB |
| Group | 1 2 3 LAP-CTE-INPE-MCTI-GOV-BR |
| Affiliation | 1 Universidade Estadual Paulista (UNESP. FEG) 2 Universidade Estadual Paulista (UNESP) 3 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Author e-Mail Address | 1 elver_jdd@feg.unesp.br 2 3 ueda@plasma.inpe.br |
| e-Mail Address | marcelo.pazos@inpe.br |
| Journal | Journal of Physics: Conference Series |
| Volume | 511 |
| Pages | 012084-012090 |
| Secondary Mark | B2_ENGENHARIAS_III B2_INTERDISCIPLINAR B3_GEOCIÊNCIAS B3_MEDICINA_II B4_ENGENHARIAS_II B4_MATERIAIS B4_BIOTECNOLOGIA C_QUÍMICA C_ENGENHARIAS_IV C_ASTRONOMIA_/_FÍSICA C_ECONOMIA C_MATEMÁTICA_/_PROBABILIDADE_E |
| History (UTC) | 2014-06-03 16:52:58 :: lattes -> administrator :: 2014-06-03 16:54:17 :: administrator -> lattes :: 2014 2014-06-03 19:44:14 :: lattes -> administrator :: 2014 2018-06-04 23:39:27 :: administrator -> marcelo.pazos@inpe.br :: 2014 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Version Type | publisher |
| Abstract | A comparison between experimental measurements and numerical calculations of the ion current distribution in plasma immersion ion implantation (PIII) with external magnetic field is presented. Later, Silicon samples were implanted with nitrogen ion to analyze the effect on them. The magnetic field considered is essentially non-uniform and is generated by two magnetic coils installed on vacuum chamber. The presence of both, electric and magnetic field in PIII create a crossed ExB field system, promoting drift velocity of the plasma around the target. The results found shows that magnetized electrons drifting in ExB field provide electron-neutral collision. The efficient ionization increases the plasma density around the target where a magnetic confinement is formed. As result, the ion current density increases, promoting significant changes in the samples surface properties, especially in the surface wettability. |
| Area | FISPLASMA |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Study of magnetic... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | pt |
| User Group | lattes marcelo.pazos@inpe.br |
| Reader Group | administrator marcelo.pazos@inpe.br |
| Visibility | shown |
| Archiving Policy | denypublisher denyfinaldraft12 |
| Read Permission | deny from all and allow from 150.163 |
| Update Permission | not transferred |
| 5. Allied materials | |
| Linking | Trabalho não Vinculado à Tese/Dissertação |
| Mirror Repository | iconet.com.br/banon/2006/11.26.21.31 |
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
| Citing Item List | sid.inpe.br/bibdigital/2013/09.25.21.49 1 |
| Dissemination | WEBSCI; PORTALCAPES; SCOPUS. |
| Host Collection | dpi.inpe.br/plutao@80/2008/08.19.15.01 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel format isbn keywords lineage mark month nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject targetfile tertiarytype typeofwork url |
| 7. Description control | |
| e-Mail (login) | marcelo.pazos@inpe.br |
| update | |